The 77th JSAP Autumn Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Kazunori Koga(Kyushu Univ.), Keiji Nakamura(Chubu Univ.)

2:15 PM - 2:30 PM

△ [16p-B7-5] Influence of interfaces on Si-H2/Si-H bond ratio of inrrinsic a-Si:H on p-layer

〇(M2)kimitaka keya1, Kazuma Tanaka1, Takashi Kojima1, Susumu Toko1, Daisuke Yamashita1, Hyunwoong Seo1, Nao Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ.)

Keywords:a-Si:H, P/I interface, Raman spectroscopy