[16p-P3-1~2] 8.5 nanotechnology.

[16p-P3-1] Simulated Microstructures for Glancing-angle Evaporation and Sputtering
in Reactive Gas Environments

〇(M2)akihiro nakao¹, Inoue Yasushi¹, Takai Osamu² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)

Keywords:simulation, glancing-angle deposition, reactive evaporation