Wakana Takeuchi

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:00 PM - 5:50 PM H101 (H)

Special Symposium
| Symposium
| Women in Applied Physics - Part4: Plasma Electronics -

[21p-H101-1~10] Women in Applied Physics - Part4: Plasma Electronics -

4:05 PM - 4:30 PM

[21p-H101-8] Characterization of Plasma Etching Damage in Semiconductor Materials by using DLTS

〇Wakana Takeuchi¹, Kusuma ndari¹, Mitsuo Sakashita¹, Osamu Nakatsuka¹, Yutaka Tokuda², Shigeaki Zaima^1,3 (1.Grad. Sc. Eng., Nagoya Univ., 2.Aichi Inst. of Tech., 3.IMaSS, Nagoya Univ.)

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