Makoto Okada

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

2:45 PM - 3:00 PM

[19p-S224-6] Molecular orientation observation of negative-tone and positive-tone liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy

〇Makoto Okada¹, Yusuke Taniguchi², Yuichi Haruyama¹, Hiroshi Ono³, Nobuhiro Kawatsuki², Shinji Matsui¹ (1.LASTI, Univ. of Hyogo, 2.Graduate School of Engineering, Univ. of Hyogo, 3.Nagaoka Univ. of Technology)

3:00 PM - 3:15 PM

[19p-S224-7] Molecular orientation evaluation of liquid crystalline polymer pattern fabricated by double nanoimprint-graphoepitaxy

4:30 PM - 4:45 PM

[19p-S224-12] Evaluation of PDMS antisticking layer formed by using PDMS-disilanol

〇Makoto Okada¹, Shinji Matsui¹ (1.LASTI, Univ. of Hyogo)

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