The 63rd JSAP Spring Meeting, 2016

Session information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

2:15 PM - 2:30 PM

Kodai Shimada1, Geng Tan1, Yasuhisa Nozawa1, Tatsuhiro Urakami2, Koji Koyama3, Masahiro Mita4, Satoru Kaneko5,1, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Inst. of Tech, 2.Mitsui Chemicals, Inc., 3.Namiki Precision Jewel Co., Ltd., 4.KYODO INTERNATIONAL, INC., 5.Kanagawa Ind. Tech. Cent.)

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