Kento Seki

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

5:30 PM - 5:45 PM

[19p-S224-16] Fabrication of through-hole membranes by laser drilling for discharging UV-curable liquids in UV nanoimprint lithography

〇Kento Seki¹, Kazuro Nagase², Nobuya Hiroshiba¹, Masaru Nakagawa¹, Takahiro Nakamura¹ (1.IMRAM Tohoku Univ., 2.Mino Group Corp.)