The 63rd JSAP Spring Meeting, 2016

Atsushi Yokoo

Chairperson, etc.

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

  • Oral presentation
  • | 7 Beam Technology and Nanofabrication
  • | 7.3 Micro/Nano patterning and fabrication

Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)