Tetsuhisa Kanahara

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

2:00 PM - 2:15 PM

[19p-S224-3] Directed self-assembly of polystyrene-block-poly(methyl methacrylate) in sub-100 nm-wide resin trenches fabricated using UV-nanoimprinting

〇(B)Tetsuhisa Kanahara¹, Ryo Okubo¹, Nobuya Hiroshiba¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)