Tatsuya Iida

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

4:00 PM - 4:15 PM

[19p-S224-10] Study on stress relaxation in thermal nanoimprint lithography

〇(B)Tatsuya Iida¹, Masaaki Yasuda¹, Hiroaki Kawata¹, Yosihiko Hirai¹ (1.Osaka Pre Univ.)