Florian Chalvin

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

5:00 PM - 5:15 PM

▲ [19p-S224-14] Induced stress during peeling release with various template stiffness in nanoimprint lithography

〇(M2)Florian Chalvin^1,2, Takamitsu Tochino¹, Naoto Nakamura¹, Masaaki Yasuda¹, Hiroaki Kawata¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ., 2.ENSEA)