HARUNA YANO

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

4:15 PM - 4:30 PM

[19p-S224-11] Dependence of film thickness on surface elasticity observed for
sub-100 nm-thick UV-cured resin films by atomic force microscopy

〇(M1)HARUNA YANO¹, SHOICHI KUBO², MASARU NAKAGAWA¹, XIAOBIN RIANG³, SO FUJINAMI⁴, KEN NAKAJIMA³ (1.Tohoku Univ., 2.NIMS, 3.Tokyo Tech., 4.RIKEN)