masaharu shimabayashi

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

10:45 AM - 11:00 AM

△ [22a-W611-7] Effect of discharge tube material in nitriding of SiC surface using a remote nitrogen plasma

〇masaharu shimabayashi¹, kazuaki kurihara², koichi sasaki¹ (1.Hokkaido Univ., 2.IMEC/Toshiba)