So Takamoto

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S221 (S2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20a-S221-1~12] 13.3 Insulator technology

9:30 AM - 9:45 AM

△ [20a-S221-3] Evaluation of Si/SiO₂ interface structure obtained by charge-transfer type molecular dynamics

〇(D)So Takamoto¹, Takahiro Yamasaki^2,3, Takahisa Ohno^2,3,4, Chioko Kaneta^3,5, Satoshi Izumi¹, Shinsuke Sakai¹ (1.Univ. of Tokyo, 2.NIMS, 3.MARCEED, 4.IIIS, Univ. of Tokyo, 5.Fujitsu Lab.)