Tomoki Tateyama

→ Search for Tomoki Tateyama in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:00 PM - 4:15 PM

[19p-S423-9] Decrease in parasitic resistance for metal S/D Ge n-MOSFET

〇(M1)Tomoki Tateyama¹, Yuta Nagatomi¹, Shintaro Tanaka¹, Keisuke Yamamoto², Dong Wang¹, Hiroshi Nakashima² (1.I-EggS, Kyushu Univ., 2.KASTEC, Kyushu Univ.)

▲