Hiromu Harada

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:00 PM - 2:15 PM

[20p-S423-2] Crystallization and Activation of P+ dope a-Ge film by Atmospheric Pressure Micro-Thermal-Plasma-Jet

〇Hiromu Harada², Nakatani Taichi¹, Shin Ryota¹, Higashi Seiichiro¹ (1.AdSM, 2.Hiroshima Univ.)