Lun Xu

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S221 (S2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20p-S221-1~17] 13.3 Insulator technology

5:15 PM - 5:30 PM

▼ [20p-S221-14] New finding of ferroelectricity of N doped HfO₂ films

〇(D)Lun Xu¹, Tomonori Nishimular¹, Shigehisa Shibayama¹, Takeaki Yajima¹, Shinji Migita², Akira Toriumi¹ (1.Univ. Tokyo, 2.AIST)