Masanori Koyama

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:30 AM - 11:30 AM P1 (Gymnasium)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication（Poster）

[19a-P1-1~17] 7 Beam Technology and Nanofabrication（Poster）

9:30 AM - 11:30 AM

[19a-P1-2] A Computational Study of Organic Resist Shrinkage during SEM Observation

〇Masanori Koyama¹, Yuki Furukawa¹, Hiroaki Kawata¹, Yoshihiko Hirai¹, Masaaki Yasuda¹ (1.Osaka Pref. Univ.)