Yuuji Kitayama

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

11:30 AM - 11:45 AM

[19a-S423-10] Evaluation of high-resolution maskless exposure using point array method

〇Yuuji Kitayama¹, Nobuo Takeda³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.DNK)