Takanori Mikahara

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

11:15 AM - 11:30 AM

[19a-S423-9] Effect of thermal convection on Minimal Si-CVD equipment

〇Takanori Mikahara^1,2, Noriko Miura¹, Yuuki Ishida², Takahiro Ito³, Shinichi Ikeda², Hitoshi Habuka⁴, Sommawan Khumpuang², Shiro Hara² (1.MINIMAL, 2.AIST, 3.ORIENTAL MOTOR, 4.Yokohama N Univ)

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