Yuta Takashima

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:15 PM - 5:45 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[19p-H137-1~17] 7.1 X-ray technologies

4:45 PM - 5:00 PM

[19p-H137-14] Latest Result of Extreme Ultra-Violet (EUV) Light Source for Semiconductor Lithography

〇Yuta Takashima¹, Tsukasa Hori¹, Yoshifumi Ueno¹, Tamotsu Abe¹, Takayuki Yabu¹, Katsuhiko Wakana¹, Yoshiaki Kato¹, Tsutomu Kashiwazaki¹, Osamu Fukuda¹, Takahisa Fujimaki¹, Yuichi Nishimura¹, Rei Takenaka¹, Toru Suzuki¹, Masahiko Andou¹, Hirokazu Hosoda¹, Koutaro Miyashita¹, Takayuki Osanai¹, Takashi Saitou¹, Hakaru Mizoguchi¹ (1.Gigaphoton)

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