Hiroaki Tomuro

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:15 PM - 5:45 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[19p-H137-1~17] 7.1 X-ray technologies

5:30 PM - 5:45 PM

[19p-H137-17] Diagnostics of LPP-EUV source plasmas using collective Thomson scattering

〇Hiroaki Tomuro¹, Tatsuya Yanagida¹, Kouichiro Kouge¹, Georg Soumagne¹, Yasunori Wada¹, Masahito Kunishima¹, Takeshi Kodama¹, Kentaro Tomita², Yuta Sato², Toshiaki Eguchi², Syouichi Tsukiyama², Kiichiro Uchino² (1.Gigaphoton Inc., 2.Kyushu Univ.)

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