Hidehumi Narita

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:30 PM - 3:30 PM P3 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19p-P3-1~7] 13.3 Insulator technology

1:30 PM - 3:30 PM

[19p-P3-2] Evaluation of Traps in Ge-MIS Structures Fabricated by Radical-enhanced ALD (2);annealing effects

〇Hidehumi Narita¹, Daichi Yamada², Yukio Fukuda², Hiroshi Okamoto¹ (1.Hirosaki Univ., 2.Tokyo Univ. of Science, Suwa)