Masaki Yamamoto

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 4:00 PM - 6:00 PM P6 (Gymnasium)

Poster presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[19p-P6-1~8] 8.3 Deposition of thin film and surface treatment

4:00 PM - 6:00 PM

[19p-P6-3] High-Speed Plasma CVD using Microwave Plasma Produced inside Slot-Antenna

〇(M1)Masaki Yamamoto¹, Suzuki Haruka¹, Toyoda Hirotaka^1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ.)