MD AMZAD HOSSAIN

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 4:00 PM - 6:00 PM P8 (Gymnasium)

Poster presentation
| 8 Plasma Electronics
| 8.8 Plasma Electronics English Session

[19p-P8-1~1] 8.8 Plasma Electronics English Session

4:00 PM - 6:00 PM

▼ [19p-P8-1] Development of High-Density RF Magnetized Sputtering Plasma Source with Square-Shaped Arrangement of Magnets for Uniform Target Utilization

〇(D)MD AMZAD HOSSAIN^1,2,3, Koichirou Ikari¹, Tsubasa Ide¹, Yasunori Ohtsu¹ (1.Saga University, 2.JesUni SciTech, 3.RajUniv EngTech)