Emi Sato

Speaker, Author, Co-Author

Sat. Mar 19, 2016 3:30 PM - 6:00 PM S223 (S2)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[19p-S223-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

5:30 PM - 5:45 PM

[19p-S223-9] The development of artificial intelligence fusion adsorption simulator for semiconductor process

〇Emi Sato¹, Manami Sato¹, Yukiko Obara¹, Kenji Inaba¹, Yukie Ishizawa¹, Masayuki Miyano¹, Ryuji Miura¹, Ai Suzuki¹, Naoto Miyamoto¹, Nozomu Hatakeyama¹, Akira Miyamoto¹, Patrick Bonnaud¹ (1.Tohoku Univ.)

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