Nobuya Nakazaki

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 2:30 PM - 5:45 PM W621 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[19p-W621-1~12] 8.4 Plasma etching

3:00 PM - 3:15 PM

[19p-W621-3] Substrate surface temperature measurement using Fourier transform infrared absorption spectroscopy during plasma etching

〇(D)Nobuya Nakazaki¹, Daisuke Fukushima¹, Hiroki Miyata¹, Hirotaka Tsuda¹, Yoshinori Takao¹, Koji Eriguchi¹, Kouichi Ono¹ (1.Kyoto Univ.)