Akiko Hirata

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 2:30 PM - 5:45 PM W621 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[19p-W621-1~12] 8.4 Plasma etching

3:45 PM - 4:00 PM

△ [19p-W621-6] Hydrogen-damage-layer effects on ITO etching by H₂/Ar plasma

〇Akiko Hirata¹, Masanaga Fukasawa¹, Takushi Shigetoshi¹, Masaki Okamoto¹, Kazunori Nagahata¹, Hu Li², Satoshi Hamaguchi², Tetsuya Tatsumi¹ (1.Sony corp., 2.Osaka Univ.)