Toru Tsunoura

→ Search for Toru Tsunoura in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 19, 2016 2:30 PM - 5:45 PM W621 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[19p-W621-1~12] 8.4 Plasma etching

4:30 PM - 4:45 PM

[19p-W621-8] Evaluation of plasma resistance of YOF ceramics

〇Toru Tsunoura¹, Katsumi Yoshida¹, Toyohiko Yano¹ (1.Tokyo Tech.)