Kensuke Takenaka

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 11:45 AM H101 (H)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20a-H101-1~10] 15.6 Group IV Compound Semiconductors (SiC)

10:45 AM - 11:00 AM

[20a-H101-7] Evaluation of crystalline dislocations of 4H-SiC single crystal substrate by observation of birefringence image

〇Kensuke Takenaka², Tomohisa Kato¹, Tatsuya Matsunaga¹, Manabu Takei², Yoshiyuki Yonezawa¹, Hajime Okumura¹ (1.AIST, 2.Fuji Electric Co., Ltd.)