Susumu Tsukimoto

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 11:45 AM H101 (H)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20a-H101-1~10] 15.6 Group IV Compound Semiconductors (SiC)

11:00 AM - 11:15 AM

[20a-H101-8] Local Strain Analysis of Surface Damaged Layers in SiC Wafer by EBSD-Wilkinson Technique

〇Susumu Tsukimoto^1,2, Tatsuhiko Ise^1,3, Satoshi Hashimoto², Tsuguo Sakurada², Junji Senzaki¹, Tomohisa Kato¹, Kazutoshi Kojima¹ (1.AIST, 2.JFE Techno-Research, 3.Asahi Diamond Industrial)

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