The 63rd JSAP Spring Meeting, 2016

Kaori Watanabe

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:30 AM - 12:45 PM H113 (H)

  • Oral presentation
  • | 15 Crystal Engineering
  • | 15.8 Crystal evaluation, impurities and crystal defects

[20a-H113-1~12] 15.8 Crystal evaluation, impurities and crystal defects

11:30 AM - 11:45 AM

[20a-H113-8] Infrared absorption measurement of low concentration carbon in Si crystal
(Ⅷ) Measurement by 2nd generation technique of 1014 cm−3 with SIMS and CPAA

〇Kaori Watanabe1, Naohisa Inoue2,9, Yasunori Goto3, Takahide Sugiyama4, Hirofumi Seki5, Masumi Obuchi6, Hiroyuki Uno7, Noriyuki Fujiyama5, Shigeru Shimada8, Yuichi Kawamura9 (1.Systems Engineering, 2.Tokyuo U. Agri&Tech., 3.Toyota Motor Co., 4.Toyota C. L., 5.Toray Res., 6.Nanoscience, 7.S.H.I Exam., 8.Bruker, 9.Osaka P. U.)