Katsuhiro Hattori

→ Search for Katsuhiro Hattori in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:15 AM - 10:30 AM KD (KD)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[20a-KD-1~5] 8.2 Plasma measurements and diagnostics

10:00 AM - 10:15 AM

△ [20a-KD-4] High accuracy temperature measurement of silicon substrate in high-powert impulse magnetron sputtering process using low-coherence interferometry

〇(M1)Katsuhiro Hattori¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Tech., 3.Nagoya Univ.)