Yoshitsugu Banno

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:15 AM - 10:30 AM KD (KD)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[20a-KD-1~5] 8.2 Plasma measurements and diagnostics

10:15 AM - 10:30 AM

[20a-KD-5] Gas ratio dependency of GaN damage on argon-chlorine plasma

〇Yoshitsugu Banno¹, Daisuke Ogawa¹, Yoshitaka Nakano¹, Keiji Nakamura¹ (1.Chubu Univ.)