Toshiyuki Horiuchi

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:30 AM - 12:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-S224-1~9] 7.3 Micro/Nano patterning and fabrication

10:45 AM - 11:00 AM

[20a-S224-5] Improvement of Pattern Width Uniformity by Controlling Each Cell Transmittance in Liquid-Crystal-Display Matrix Exposure

〇Toshiyuki Horiuchi¹, Shota Haneishi¹, Yumika Yoshida¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)