Toshiki Tanaka

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:30 AM - 12:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-S224-1~9] 7.3 Micro/Nano patterning and fabrication

11:00 AM - 11:15 AM

[20a-S224-6] Computational study on novel photolithography on deep stepped substrate by Built-in lens mask lithography

〇Toshiki Tanaka¹, Masaru Sasago¹, Hisao Kikuta¹, Hiroaki Kawata¹, Yoshikhiko Hirai¹ (1.Osaka Pref. Univ.)