Shogo Nakata

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20a-S423-1~9] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

9:30 AM - 9:45 AM

△ [20a-S423-3] Highly Selective Flexible Tactile Pressure Sensor

〇(B)Shogo Nakata¹, Kenichiro Kanao¹, Shingo Harada¹, Takayuki Arie¹, Seiji Akita¹, Kuniharu Takei¹ (1.Osaka Pref Univ.)