Kazuyoshi Ono

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20a-S423-1~9] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

9:45 AM - 10:00 AM

[20a-S423-4] Nonlinear Oscillation for an Electrostatic MEMS energy harvester (1)

〇Kazuyoshi Ono¹, Alexander Yu^1,2, Norio Sato³, Yujiro Tanaka¹, Tomomi Sakata³, Yoshito Jin^1,3, Hiroshi Koizumi¹ (1.NTT Device Technology Labs., 2.Georgia Institute of Tech, 3.NTT Device Innovation Center)

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