Masato Suzuki

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20a-S423-1~9] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

10:00 AM - 10:15 AM

[20a-S423-5] The Design of High Efficiency Electret-MEMS Transformer

〇Masato Suzuki¹, Takashi Moriyama¹, Hashiguchi Gen¹ (1.Shizuoka Univ.)