Yohei Sobu

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 10:00 AM - 12:15 PM S621 (S6)

Oral presentation
| 3 Optics and Photonics
| 3.15 Silicon photonics

[20a-S621-1~8] 3.15 Silicon photonics

11:45 AM - 12:00 PM

△ [20a-S621-7] High coupling efficiency Si-wire grating couplers by ArF-immersion lithography

〇Yohei Sobu¹, Seok-hwan Jeong¹, Yu Tanaka¹, Ken Morito¹ (1.PETRA)