Tomo Harata

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[20p-H103-1~21] 6.2 Carbon-based thin films

6:30 PM - 6:45 PM

△ [20p-H103-20] The effect of RF power on amorphous carbon nitride films prepared by sputtering and its photoinduced deformation

〇Tomo Harata¹, Masami Aono¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (1.NDA)