Kazunari Kurita

→ Search for Kazunari Kurita in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 20, 2016 2:15 PM - 5:45 PM H113 (H)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[20p-H113-1~13] 15.8 Crystal evaluation, impurities and crystal defects

2:15 PM - 2:30 PM

[20p-H113-1] Characteristic of Carbon Cluster Ion Implanted Epitaxial Silicon Wafers (1)
- Gettering Ability of Metal Impurity Contaminated Device Fabrication Process -

〇Kazunari Kurita¹, Ryosuke Okuyama¹, Ayumi Masada¹, Takeshi Kadono¹, Ryo Hirose¹, Yoshiaki Koga¹, Hidehiko Okuda¹ (1.SUMCO CORPORATION)