Akio Yoneyama

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 2:15 PM - 5:45 PM H113 (H)

Oral presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[20p-H113-1~13] 15.8 Crystal evaluation, impurities and crystal defects

5:00 PM - 5:15 PM

[20p-H113-11] Quantitative analysis of crystal distortion in SiC wafer using scanning X-ray topography

〇Akio Yoneyama¹, Natsuki Yokoyama¹, Renichi Yamada¹ (1.Hitachi)