Norihiro Itagaki

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:15 PM - 7:45 PM H121 (H)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[20p-H121-1~24] 15.4 III-V-group nitride crystals

7:30 PM - 7:45 PM

[20p-H121-24] Fabrication of GaN with reverse mesa pattern by inductive coupled plasma reactive ion etching

〇(M1)Norihiro Itagaki¹, Nagatoshi Kei¹, Okada Narihito¹, Inomoto Ryou¹, Nishimiya Tomoharu², Matsuo Humiharu², Tadatomo Kazuyuki¹ (1.Yamaguchi Univ., 2.SAMCO Corp.)

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