Akihiro Ogawa

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:15 PM - 5:15 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[20p-H137-1~15] 7.5 Ion beams

4:30 PM - 4:45 PM

[20p-H137-13] Incident angle dependence of etching effects of metals with O₂-GCIB in acetic acid atmosphere

〇Akihiro Ogawa¹, Noriaki Toyoda¹, Isao Yamada¹ (1.Univ. of Hyogo)