Kengo Akimoto

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:15 PM - 5:15 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[20p-H137-1~15] 7.5 Ion beams

1:45 PM - 2:00 PM

[20p-H137-3] Reactions between Nitrogen Molecules and Metal Cluster Ions
Formed by High Power Impulse Magnetron Sputtering

〇Kengo Akimoto¹, Isamu Mizuuchi¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto^1,2, Motoyoshi Nakano¹, Keijiro Ohshimo¹, Fuminori Misaizu¹ (1.Tohoku Univ., 2.Ayabo Corporation)