masaya fujita

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 4:00 PM - 6:00 PM P13 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[20p-P13-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

4:00 PM - 6:00 PM

[20p-P13-1] Fabrication of high-quality Er₂O₃ thin film using ion beam sputter deposition method

〇masaya fujita^1,2, Hidehito Asaoka², Kenji Yamaguchi² (1.Ibaraki Univ., 2.Japan Atomic Energy Agency)