Tomonari Furuya

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 11:45 AM H103 (H)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[21a-H103-1~10] 6.4 Thin films and New materials

9:00 AM - 9:15 AM

[21a-H103-1] Crystallization suppression of CeO₂ thin films deposited by MOCVD by additional TEOS introduction

〇Tomonari Furuya¹, Takashi Matsumura¹, Kensuke Kikuchi¹, Yuta Suzuki¹, Setsu Suzuki², Keiji Ishibashi², Yasuhiro Yamamoto¹ (1.Hosei Univ., 2.Comet Inc.)