Takeshi Kobayashi

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:15 PM W641 (W6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[21a-W641-1~12] 6.1 Ferroelectric thin films

10:30 AM - 10:45 AM

[21a-W641-7] Influence of pulse poling on the piezoelectric property of PZT thin films
on Si substrate and MEMS cantilevers

〇Takeshi Kobayashi¹, Natsumi Makimoto¹ (1.AIST)