Satoshi Ueoka

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H103 (H)

Oral presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[21p-H103-1~21] 6.4 Thin films and New materials

3:45 PM - 4:00 PM

[21p-H103-10] Annealing-temperature dependence of Capacitance-Voltage characteristics of HfO₂/SiO_X/Si structures

〇(M1)Satoshi Ueoka¹, Shozo Miyake¹, Yasushi Hotta¹, Koji Arafune¹, Shin-ichi Satoh¹ (1.Univ. of Hyogo)