Hirokazu Yoshino

→ Search for Hirokazu Yoshino in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H116 (H)

Oral presentation
| 3 Optics and Photonics
| 3.8 Optical measurement, instrumentation, and sensor

[21p-H116-1~22] 3.8 Optical measurement, instrumentation, and sensor

1:30 PM - 1:45 PM

[21p-H116-2] The development of thin film metrology by coherence scanning interferometry

〇Hirokazu Yoshino¹, Daniel Mansfield², Roger Smith¹, Michael Walls¹ (1.Loughborough Univ., 2.Taylor Hobson Ltd)